1985�`1994”N
- K.Yamaguchi, K.Okamoto and T.Imai : �g Selective Epitaxial Growth of GaAs by Metalorganic
Chemical Vapor Deposition �g, Jpn. J. Appl. Phys., Vol.24, No.12 (1985) pp.1666-1671.
- K.Okamoto and K.Yamaguchi : �g Selectively Buried Epitaxial Growth of GaAs by Metalorganic
Chemical Vapor Deposition �g, Appl. Phys. Lett., Vol.48, No.13 (1986) pp.849-851.
- K.Okamoto, M.Furuta and K.Yamaguchi : �g Lateral Growth on (110) GaAs Substrates by
Metalorganic Chemical Vapor Deposition �g, Jpn. J. Appl. Phys., Vol.27, No.3 (1988) pp.L437-
L440.
- K.Okamoto, M.Furuta and K.Yamaguchi : �g Zn and Si Doping in {110} GaAs Epilayers Grown by
Metalorganic Chemical Vapor Deposition �g, Jpn. J. Appl. Phys., Vol.27, No.11 (1988) pp.L2121-
L2124.
- K.Yamaguchi and K.Okamoto : �g Lateral Growth on {111}B GaAs Substrates by Metalorganic
Chemical Vapor Deposition �g, J. Cryst. Growth, Vol.94 (1989) pp.203-207.
- K.Yamaguchi and K.Okamoto : �g Lateral Growth of GaAs over SiO2 Films Prepared on (111)B
Substrates by Metalorganic Chemical Vapor Deposition �g, Jpn. J. Appl. Phys., Vol.28, No.4 (1989)
pp.685-689.
- K.Yamaguchi and K.Okamoto : �g Atom Beam-Irradiation Effects on Selective Epitaxial Growth of
GaAs by Metalorganic Chemical Vapor Deposition �g, Jpn. J. Appl. Phys., Vol.28, No.9 (1989)
pp.L1489-L1492.
- K.Okamoto, H.Mawatari, K.Yamaguchi and A.Noguchi : �g Zinc-Doped GaAs Epilayers Grown by Atmospheric-Pressure MOCVD Using Diethylzinc �g, J. Cryst. Growth, Vol.98 (1989) pp.630-636.
- K.Yamaguchi and K.Okamoto : �g Selective Epitaxial Growth of AlGaAs by Atmospheric-Pressure
MOCVD Using Diethylgalliumchloride and Diethylaluminumchloride �g, Jpn. J. Appl. Phys.,
Vol.29, No.8 (1990) pp.1408-1414.
- K.Okamoto, H.Koizumi and K.Yamaguchi : �g DX Centers in Si-Doped AlxGa1-xAs Grown by
Metalorganic Chemical Vapor Deposition �g, J. Appl. Phys., Vol.68, No.4 (1990) pp.1669-1673.
- K.Yamaguchi and K.Okamoto : �g Analysis of Deposition Selectivity in Selective Epitaxy of GaAs
by Metalorganic Chemical Vapor Deposition �g, Jpn. J. Appl. Phys., Vol.29, No.11 (1990) pp.2351-
2357.
- K.Yamaguchi and K.Okamoto : �g Selective Epitaxial Growth on (100) Vicinal GaAs Surfaces by
Atmospheric-Pressure Metalorganic Chemical Vapor Deposition Using Diethylgalliumchloride �g,
Jpn. J. Appl. Phys., Vol.30, No.2B (1991) pp.L231-L234.
- K.Okamoto, H.Tosaka and K.Yamaguchi : �g Profiling of Double-Crystal X-Ray Diffraction of
InGaAs Epilayers Grown on GaAs �g, Jpn. J. Appl. Phys., Vol.30, No.6 (1991) pp.1239-1242.
- K.Yamaguchi and K.Okamoto : �g Fabrication of GaAs Fine Stripe Structures by Selective
Metalorganic Chemical Vapor Deposition Using Diethylgalliumchloride �g, Appl. Phys. Lett.,
Vol.59, No.27 (1991) pp.3580-3582.
- K.Yamaguchi and K.Okamoto : �g (Invited) Selective Epitaxial Growth of AlGaAs by MOCVD
Using Dialkylmetalchloride �g, 2nd Int. Meeting on Advanced Processing and Characterization
Technologies (APCT-2), Fabrication and Characterization of Semiconductor Optoelectronic Devices
and Integrated Circuits (May 8-10, 1991) Florida [Proceedings, pp.17-20].
- K.Okamoto, O.Ito and K.Yamaguchi : �g Metalorganic Chemical Vapor Deposition of GaAs on
(111)B Substrates by Using Diethylgalliumchloride �g, Jpn. J. Appl. Phys., Vol.31, No.7A (1992)
pp.L820-L822.
- K.Yamaguchi, S.Kishida and K.Okamoto : �g Doping Properties of GaAs Selective Epilayers Grown
by Atmospheric-Pressure Metalorganic Chemical Vapor Deposition �g, Jpn. J. Appl. Phys., Vol.31,
No.10A (1992) pp.L1377-L1380.
- K.Yamaguchi, M.Ogasawara and K.Okamoto : �g Surface-Diffusion Model in Selective
Metalorganic Chemical Vapor Deposition ", J. Appl. Phys., Vol.72, No.12 (1992) pp.5919-5925.
- ŽRŒû�_ˆê�AŠÝ“c”ÉŽ÷�A‰ª–{�F‘¾˜Y: �uƒNƒ�ƒ‰ƒCƒhŒn—L‹@‹à‘®‚ð—p‚¢‚½‘I‘ðMOCVD–@‚É‚æ‚éAlGaAs/GaAsŒn”Œõ‘fŽq‚Ì�ì�»�v, “d‹C’Ê�M‘åŠw‹I—v�@‘æ6Šª ‘æ1�†�i1993”N6ŒŽ�jpp.1-8.
- K.Yamaguchi and K.Okamoto : �g Lateral Supply Mechanisms in Selective Metalorganic Chemical
Vapor Deposition �g, Jpn. J. Appl. Phys., Vol.32, No.4 (1993) pp.1523-1527.
- K.Yamaguchi and K.Okamoto : �g Anisotropic Ridge Growth by Step-Flow-Mode Metalorganic
Chemical Vapor Deposition Using Diethylgalliumchloride �g, Jpn. J. Appl. Phys., Vol.32, No.11A
(1993) pp.4885-4888.
- K.Yamaguchi and K.Okamoto : �gRidge-Growth Mechanism in Selective MOCVD�h, Extended Abstract of the 12th Symposium Record on Alloy Semiconductor Physics and Electronics, Izunagaoka, (1993. July) ‡Z-16, pp.435-440.
- ŽRŒû�_ˆê�A“’‹½�¬”ü�F�u‘–�¸Œ^ƒgƒ“ƒlƒ‹Œ°”÷‹¾�iSTM�j‚ÌŽŽ�ì�v,“d‹C’Ê�M‘åŠw‹I—v�@‘æ7Šª ‘æ1�†�i1994”N6ŒŽ�jpp.7-14.
- ŽRŒû�_ˆê�A“’‹½�¬”ü�F�u‘–�¸Œ^ƒgƒ“ƒlƒ‹Œ°”÷‹¾�iSTM�j‚ÌŽŽ�ì [‡U]�v, “d‹C’Ê�M‘åŠw‹I—v�@‘æ7Šª ‘æ2�†�i1994”N12ŒŽ�jpp.133-140.
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